Advanced Energy Unveils Aera(R) PI-980(TM) Pressure-Insensitive MFC With NeuralStep(TM) Control Technology
July 05 2005 - 7:00AM
PR Newswire (US)
Advanced Energy Unveils Aera(R) PI-980(TM) Pressure-Insensitive MFC
With NeuralStep(TM) Control Technology Next-Generation
Pressure-Insensitive MFC for Etch, CVD, PVD and Diffusion Processes
Enables Exceptionally Fast Response and Higher Yields FORT COLLINS,
Colo., July 5 /PRNewswire-FirstCall/ -- Advanced Energy Industries,
Inc. (NASDAQ:AEISE) today unveiled its next-generation Aera(R)
PI-980(TM) series of pressure-insensitive mass flow controllers
(MFCs) for advanced semiconductor applications. Designed to improve
processes for etch, CVD, PVD and diffusion, the PI-980 MFC's
innovative technology provides greater gas-flow stability, higher
accuracy, exceptionally fast response and superior real-time
process control. Its highly stable flow delivers greater process
control and repeatability, maximizing production yields. (Logo:
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO) The PI-980
series complements the recently released Aera Transformer(TM)
780/7800 series of digital MFCs, allowing fabs and OEMs to
standardize on the latest technologies from Aera across multiple
process steps and varied application requirements. By combining
exceptionally fast NeuralStep(TM) control technology with an
integrated pressure transducer, the PI-980 MFC dramatically
increases the speed of the MFC response. This increased speed
virtually eliminates the effects of upstream and downstream
pressure disturbances. Faster response delivered with excellent
flow stability enable shorter process steps, stable chamber-gas
delivery, higher accuracy, higher repeatability and a wide,
multi-gas control range. The result is optimized process
performance and maximized yields. Further, the PI-980 MFC enhances
overall system cost of ownership by eliminating the need for a
number of traditional, costly gas-panel components. Its multi-gas,
multi-range functionality dramatically reduces inventory
requirements. Steve Rhoades, executive vice president, Products and
Operations, noted, "Our new PI-980 MFCs with NeuralStep technology
are a best-in-class addition to Aera's world renowned line of MFCs.
This is a great example of AE's continuing commitment to technology
innovation. It's also a great example of AE's continuing commitment
to increasing our customers' competitive advantage." About Advanced
Energy Advanced Energy is a global leader in the development and
support of technologies critical to high-technology manufacturing
processes used in the production of semiconductors, flat panel
displays, data storage products, compact discs, digital video
discs, architectural glass and other advanced product applications.
Leveraging a diverse product portfolio and technology leadership,
AE creates solutions that maximize process impact, improve
productivity and lower cost of ownership for its customers. This
portfolio includes a comprehensive line of technology solutions in
power, flow management, thermal instrumentation and plasma and ion
beam sources for original equipment manufacturers (OEMs) and
end-users around the world. AE operates in regional centers in
North America, Asia and Europe and offers global sales and support
through direct offices, representatives and distributors. Founded
in 1981, AE is a publicly held company traded on Nasdaq National
Market under the symbol AEIS. More information can be found at
http://www.advanced-energy.com/ Advanced Energy, AE, Aera and
PI-980 are trademarks of Advanced Energy Industries.
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO
http://photoarchive.ap.org/ DATASOURCE: Advanced Energy Industries,
Inc. CONTACT: Marna Shillman, Corporate Communication Manager of
Advanced Energy Industries, Inc., +1-970-407-6280, ; or Angie
Kellen, Sr. Account Manager of MCA, +1-650-968-8900, , for Advanced
Energy Industries, Inc. Web site: http://www.advanced-energy.com/
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