MYK Mykrolis Corp

Altis Semiconductor Selects Mykrolis Fluorogard RS(R) Product Line for Photoresist Stripping and Polymer Removal Applications High-Capacity Filtration Technology Extends Filter Lifetime, Maximizing Total Filtration Volume and System Uptime Billerica, Mass., June 28 /PRNewswire-FirstCall/ -- Mykrolis Corporation (NYSE:MYK), a leading supplier of components and subsystems to the semiconductor industry, today announced that Altis Semiconductor, a wafer fab company which manufactures devices down to 0.13(mu)m and specializes in manufacturing state of the art electronic components, has qualified Fluorogard(R) RS product line for photochemical stripping. Altis will be using Mykrolis's Fluorogard RS filters at their facility in France, one of the largest semiconductor device manufacturing plants in Europe. During a photochemical stripping process evaluation of the Mykrolis Fluorogard RS product line, the performance of the Fluorogard RS-M, in particular, exceeded expectations. The Fluorogard RS-M filter achieved a filter time of two months -- four times longer that of the previous filter, and significantly reduced tool downtime caused by bath contamination. "We are pleased that Altis Semiconductor has recognized and will benefit from the improved filtration technology of our Fluorogard RS product line," said Randy Broomhall-Dillard, product manager at Mykrolis. Mykrolis's Fluorogard RS filters provide ultimate protection from films, gels, and hard-particle contaminants encountered in photoresist-stripping and polymer removal applications used in the semiconductor manufacturing process. Designed to last two to three times longer than existing filters, Fluorogard RS filters offer a lower cost of ownership. The filters are available in a variety of retention ratings (0.05, 0.1 and 0.2 (mu)m) and in the following configurations: * Fluorogard P-RS (Pre-Resist Stripping) -- PTFE pre-filter used in conjunction with the Fluorogard RS-T in non-ashing photoresist stripping * Fluorogard RS-M (Resist Stripping Multi-membrane) -- compact PTFE pre- filter/membrane filter combination for non-ashing photoresist stripping * Fluorogard RS-T (Resist Stripping Thick) -- PTFE membrane filter optimized for photoresist stripping and residue removal after ashing About Altis Semiconductor Altis Semiconductor is a French 8" wafer fab, which manufactures devices down to 0.13(mu)m. Altis is a joint venture between Infineon Technologies and IBM Microelectronics. Altis Semiconductor was created in July 1999 as a 50/50 joint-venture between two major players in the international semiconductor industry, Infineon Technologies and IBM Microelectronics Division. Combining the strengths of two world wide semiconductor companies, as well as drawing from their complementary cultures, creates a highly dynamic and creative company, specialized in the manufacturing of state of the art electronic components. For more information visit http://www.altissemiconductor.com/. About Mykrolis Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Mykrolis is formerly Millipore Microelectronics, Inc. For more information, visit http://www.mykrolis.com/. Fluorogard and Mykrolis are registered trademarks of Mykrolis Corporation. PRESS CONTACT: Craig B. Lazinsky Mykrolis Corporation Tel. +01 978-436-6743 DATASOURCE: Mykrolis Corporation CONTACT: Craig B. Lazinsky of Mykrolis Corporation, +1-978-436-6743, Web site: http://www.mykrolis.com/

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