Mykrolis to Showcase Leading Edge Digital Gas Delivery Solutions at SEMICON West
July 11 2005 - 9:00AM
PR Newswire (US)
Mykrolis to Showcase Leading Edge Digital Gas Delivery Solutions at
SEMICON West Advanced Flow, Vacuum and Pressure Products
Experiencing Wide, Industry Acceptance and Market Share Gain
BILLERICA, Mass., July 11 /PRNewswire-FirstCall/ -- Mykrolis
Corporation (NYSE:MYK), a leading supplier of components and
subsystems to the semiconductor industry, will showcase several of
its advanced gas delivery and chamber pressure control technologies
at SEMICON West (Booth #710/South Hall) in San Francisco, July
12-14, 2005. These digitally enabled solutions have received strong
industry acceptance worldwide from both semiconductor equipment and
chip manufacturers. "Mykrolis's digital technologies offer superior
performance and quality combined with worldclass support --
enabling critical gas delivery and chamber pressure control for
advanced semiconductor processing," stated Charles Adcock, senior
marketing manager at Mykrolis. "The strength of these solutions is
apparent with the past year's sales growth rate outpacing industry
averages by 33% for both OEMs and End-users across the globe." The
digital gas delivery flow, vacuum and pressure products featured at
SEMICON West this year will include: * IntelliFlow(R)3 XP --
Digital, third generation mass flow controllers that deliver
extreme performance for key attributes such as pressure
insensitivity, increased accuracy, enhanced response time, wider
control range and programmability, enabling superior capability for
next generation etch, deposition and thermal processes. *
SolidSense(R) II -- Digital based pressure transducers that utilize
leading edge, glass-fused strain gauge technology, digital
temperature compensation and unique stress isolation techniques for
superior stability and enhanced tool availability. * XacTorr(R) CMX
-- Digital high performance capacitance diaphragm gauges (CDGs)
designed for demanding thin-film applications. Superior accuracy
and stability is enabled through a combination of Mykrolis's
patented shielded sensor technology, active temperature control and
digital electronic architecture. * Intellisys(TM) Smart Butterfly
Valve -- Digital, integrated throttle valves and controllers
incorporate true adaptive control algorithms, a direct drive
micro-stepper motor and closed loop motor feedback for superior
valve response time and control resolution that enables enhanced
process yields and tool throughput. About Mykrolis Mykrolis is a
worldwide developer, manufacturer and supplier of liquid and gas
delivery systems, components and consumables used to precisely
measure, deliver, control and purify the process liquids, gases and
chemicals, as well as the deionized water, photoresists and vacuum
systems utilized in the semiconductor manufacturing process. In
addition, the Company's products are used to manufacture a range of
other products, such as flat panel displays, high purity chemicals,
photoresists, solar cells, gas lasers, optical disks and fiber
optic cables. Based in Billerica, Massachusetts, Mykrolis is
formerly Millipore Microelectronics, Inc. For more information,
visit http://www.mykrolis.com/. IntelliFlow, XacTorr, SolidSense
are registered trademarks of Mykrolis Corporation. Intellisys is a
trademark of Nor-Cal used under license by Mykrolis. PRESS CONTACT:
Craig Lazinsky Mykrolis Corporation Tel. 978-436-6743 DATASOURCE:
Mykrolis Corporation CONTACT: Craig Lazinsky of Mykrolis
Corporation, +1-978-436-6743, Web site: http://www.mykrolis.com/
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