Explanation of Responses:
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(
1)
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The restricted stock units convert into common stock on a one-to-one basis.
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(
2)
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Disposed of pursuant to merger agreement between issuer and Amtech Systems, Inc., in exchange on a per share basis for .3291 shares of Amtech common stock having a market value of $8.20 per share on the effective date of the merger.
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3)
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Mr. van der Wansem disclaims beneficial ownership of the shares held by the Partnership except to the extent of his pecuniary interest
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4)
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Mr. van der Wansem disclaims beneficial ownership in shares held by his wife.
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5)
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Mr. van der Wansem disclaims any beneficial ownership in shares held by the 1981 Van der Wansem Family Trust
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6)
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The restricted stock units were accelerated as a result of the merger.
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7)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 21,720 shares of Amtech common stock for $30.54 per share.
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8)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 10,860 shares of Amtech common stock for $15.23 per share.
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9)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 10,860 shares of Amtech common stock for $12.34 per share.
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10)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 16,455 shares of Amtech common stock for $17.60 per share.
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11)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 11,518 shares of Amtech common stock for $16.35 per share
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12)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 11,518 shares of Amtech common stock for $21.24 per share.
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13)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 6,911 shares of Amtech common stock for $27.47 per share
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14)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 6,911 shares of Amtech common stock for $10.82 per share.
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15)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 8,227 shares of Amtech common stock for $9.21 per share.
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16)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 8227 shares of Amtech common stock for $6.08 per share.
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17)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 4,113 shares of Amtech common stock for $7.14 per share.
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18)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 5,923 shares of Amtech common stock for $9.94 per share.
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