BEVERLY, Mass., Feb. 21, 2017 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today that it has received orders for Purion H™
high current and the Purion M™ mid current implanters from a
leading semiconductor manufacturer. This is the third major
chipmaker to install the complete Purion Platform, and the first
for non-memory applications. The Purion H and Purion M join the
Purion XE™ which is already in high volume production at the
customer site. The systems will ship in the first quarter.
Executive Vice President, Customer Operations John Aldeborgh, commented, "Our customer focused
approach combined with our expanding portfolio of advanced
technology has allowed us to expand our footprint at this leading
chipmaker. This customer can now harness the full power of the
Purion platform across the full spectrum of the implant
applications space, to support their existing and emerging
manufacturing requirements."
The Power of Purion
The Purion platform redefines the ion implanter application space,
delivering unmatched purity, precision and productivity to enhance
customers' device performance and yield. On this
platform, Axcelis has built the industry's first complete implant
product solution designed specifically for advanced planar and 3D
devices while providing the most flexible and productive
manufacturing capability for our customers. The systems' common
cross-product platform architecture is designed to drive
manufacturing flexibility and lower the total cost of fab
operations. All Purion implanters incorporate Axcelis' industry
leading Purion Contamination Shield™ Defense System, for
unsurpassed implant quality, so even the most sensitive devices can
realize optimized device performance. The platform's
proprietary Purion Vector™ dose and angle control system, and
constant focal length scanning deliver the most precise and
repeatable dopant placement available today. The
platform's superior beam current performance combined with the
Purion™ 500wph end station provides the industry's highest
productivity. The Purion platform includes the Purion M™ medium
current implanter, the Purion H™ high current implanter, and the
Purion XE™ and Purion VXE™ high energy implanters.
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
35 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.