Cascade Microtech Introduces World's First 45 nm-capable DC/RF Parametric Probe Card Solutions, Lowers Cost of Ownership
January 29 2008 - 6:25PM
PR Newswire (US)
BEAVERTON, Ore., Jan. 29 /PRNewswire-FirstCall/ -- Cascade
Microtech today introduced two new Pyramid(R) parametric probe
cards that allow single-pass high performance DC and RF
measurements and reduce the cost of parametric production test for
semiconductors with advanced processes nodes at 65 nm, 45 nm and
beyond. These leading-edge probe cards leverage Cascade Microtech's
new Pyramid Plus(TM) parametric probe card manufacturing
technology. Pyramid Plus provides greater mechanical performance,
lower leakage, low contact resistance and lowest inductance to
rapidly deliver the most accurate and reliable measurements of
ever-smaller process monitoring test structures. The exclusive
Pyramid Plus membrane manufacturing process enables multiple
specification improvements such as state-of-the-art leakage
performance, to 1 fA with a 5-second settling time, improved
parametric performance, and reliable contact on smaller test pads.
Cascade Microtech's membrane technology is unique in its ability to
integrate 20 GHz transmission lines and guarded traces to the probe
tip, respectively reducing crosstalk and improving settling time.
"As silicon technologies shrink, process monitoring test structures
located in the scribe lines are creating electrical and mechanical
challenges," said Geoff Wild, chief executive officer, Cascade
Microtech. "It is harder than ever to accurately and reliably probe
smaller pads on silicon wafers during yield monitoring, process
control monitoring and wafer acceptance testing with existing
needle technology. Only Cascade Microtech has the exacting
technology needed to perform DC and RF measurements on these new
test elements." As chip geometries decrease and process
complexities increase, the difficulties of measuring key parametric
indicators include smaller DC currents, lower leakages, and tighter
interconnection geometries. In addition, RF techniques are becoming
critical production tests to measure RF passive components,
high-speed CMOS technologies, and circuit reactance on small
junctions. Cascade Microtech's advanced Pyramid probe card
technology is unique in its ability to make these low-level DC
measurements while at the same time facilitating RF measurements in
a single solution. No other probe card technology provides the
flexibility to make high-performance DC and RF measurements from
the same card. Pyramid Plus Technology Lowers Cost of Ownership As
wafer manufacturers continue to strive to maximize the die yield
per wafer by reducing the width of scribe lines located between
functional die, shrinking probe pads on parametric test structures
are becoming increasingly difficult to contact. Pyramid Plus
technology enables probing of 30 microns squared probe pads.
Cascade Microtech's unique MicroScrub technology nets consistently
smaller scrub marks and uniform marking, yielding less particle
generation that can contaminate the wafer, essential for in-line
parametric testing. MicroScrub allows the same probe card to be
used for both Cu and Al pads, reducing the number of probe cards,
probers and setups, lowering the cost of ownership. The permanent
probe tip alignment and consistent low contact resistance of
Pyramid probes extend the probe card lifetime, setting a new
standard in low maintenance overhead. Configuration and
Availability The parametric Pyramid Probe cards are available in
either DC only (PDC50) or DC plus RF (PRF50) configurations, with
options for pad size and leakage specifications. The probe cards
are available for order immediately; price and delivery times vary
depending upon configuration. The new Pyramid parametric probe
cards are compatible with Keithley S600 Series and Agilent
4070/4080 Series parametric testers for performing precision DC and
RF parametric tests About Cascade Microtech Cascade Microtech, Inc.
(NASDAQ:CSCD) is a worldwide leader in the precise electrical
measurement and test of integrated circuits (ICs) and other small
structures. For technology businesses and scientific institutions
that need to evaluate small structures, Cascade Microtech delivers
access to, and extraction of, electrical data from wafers,
integrated circuits (ICs), IC packages, circuit boards and modules,
MEMS, biological structures, electro-optic devices and more.
Cascade Microtech's leading-edge semiconductor production test
consumables include unique probe cards and test sockets that reduce
manufacturing costs of high-speed and high-density semiconductor
chips. Information about Cascade Microtech can be found on the Web
at http://www.cascademicrotech.com/. DATASOURCE: Cascade Microtech,
Inc. CONTACT: Cali Sartor of Cascade Microtech, Inc.,
+1-503-601-1000, ; or Debra Seifert of McClenahan Bruer
Communications, +1-503-546-1000, , for Cascade Microtech, Inc. Web
site: http://www.cascademicrotech.com/
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