Explanation of Responses:
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1)
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The restricted stock units convert into common stock on a one-to-one basis.
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2)
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Disposed of pursuant to merger agreement between issuer and Amtech Systems, Inc., in exchange on a per share basis for .3291 shares of Amtech common stock having a market value of $8.20 per share on the effective date of the merger.
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3)
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The restricted stock units were accelerated as a result of the merger.
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4)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 2,632 shares of Amtech common stock for $15.23 per share.
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5)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 2,632 shares of Amtech common stock for $12.34 per share.
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6)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 1,579 shares of Amtech common stock for $12.34 per share.
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7)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 2,106 shares of Amtech common stock for $12.34 per share.
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8)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 2,303 shares of Amtech common stock for $17.60 per share.
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9)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 1,974 shares of Amtech common stock for $16.35 per share.
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10)
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This option which is fully vested, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 1,645 shares of Amtech common stock for $21.24 per share.
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11)
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This option which vests in equal installments on May 20, 2012, May 20, 2013, May 20, 2014 and May 20, 2015, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 987 shares of Amtech common stock for $27.47 per share.
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12)
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This option which vests in equal installments on November 3, 2012, November 3, 2013, November 3, 2014 and November 3, 2015, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 1,053 shares of Amtech common stock for $10.82 per share.
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13)
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This option which vests in equal installments on June 4, 2013, and June 4, 2014, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 1,184 shares of Amtech common stock for $9.21 per share.
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14)
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This option which vests in equal installments on November 5, 2013, and November 5, 2014, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 1,448 shares of Amtech common stock for $6.08 per share.
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15)
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This option which vests in equal installments on June 3, 2014 and June 3, 2015, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 789 shares of Amtech common stock for $7.14 per share.
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16)
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This option which vests in equal installments on November 4, 2014, and November 4, 2015, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 1,151 shares of Amtech common stock for $9.94 per share.
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17)
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This option which vests in equal installments on December 8, 2015, and December 8, 2016 and December 8, 2017, was assumed by Amtech Systems, Inc., in the merger and converted into an option to purchase 1,974 shares of Amtech common stock for $7.87 per share.
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