Applied Materials’ Next-Generation E-Beam Inspection System Provides Industry’s Highest Resolution
July 11 2016 - 6:30AM
Applied Materials, Inc. today announced its next-generation e-beam
inspection system is delivering the highest resolution and image
quality at the fastest throughput to leading foundry, logic, DRAM
and 3D NAND customers as they move to advanced nodes.
The Applied PROVision™ system is the industry’s most advanced
e-beam inspection tool, incorporating innovations based on more
than 20 years of leading expertise in e-beam technology for review
and metrology. It is the only e-beam hotspot inspection tool
offering down to 1nm resolution, allowing customers to detect the
most challenging “killer” defects that other technologies cannot
find, and to monitor process marginality to rapidly resolve ramp
issues and achieve higher yields.
“The PROVision system is the latest addition to our leading
e-beam portfolio, and is a key part of Applied’s growth strategy,”
said Bob Perlmutter, vice president and general manager of
Applied’s Imaging and Process Control Group. “Our differentiated
e-beam column technology is the best in the industry and when
coupled with our customers’ new inspection methodologies, enables
the PROVision system to go beyond R&D use and into production
environments.”
The PROVision system is gaining momentum with already more than
a dozen shipments, including repeat orders from a leading foundry
and a major memory manufacturer. Additional systems are scheduled
for shipment to existing and new customers in the second half of
2016.
“The PROVision system’s unique combination of high resolution
and massive sampling has helped accelerate time to solution and
time to market for our advanced nodes,” said Dr. Oh-Jang Kwon, SK
hynix R&D EBI Group.
Offering 3x faster throughput over existing e-beam hotspot
inspection tools, the PROVision system ensures accurate process
characterization, prediction and detection of performance- and
yield-limiting defects throughout the fab product life cycle. The
PROVision system complements Applied’s e-beam metrology and review
products as well as the optical patterned wafer inspection product
line.
Applied Materials, Inc. (Nasdaq:AMAT) is the leader in materials
engineering solutions used to produce virtually every new chip and
advanced display in the world. Our expertise in modifying materials
at atomic levels and on an industrial scale enables customers to
transform possibilities into reality. At Applied Materials, our
innovations make possible the technology shaping the future. Learn
more at www.appliedmaterials.com.
A photo accompanying this announcement is available at
http://www.globenewswire.com/NewsRoom/AttachmentNg/970bc6aa-df95-4f6c-9715-594d20960713
Contact:Kevin Winston (editorial/media) 408.235.4498Michael
Sullivan (financial community) 408.986.7977
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