MYK Mykrolis Corp

Mykrolis Introduces New Planarcore(TM) PVA Brushes for Enhanced Post-CMP Wafer Cleaning and Polishing Innovative integrally molded design of polyvinyl acetal (PVA) brushes ensures consistency and process stability BILLERICA, Mass., June 30 /PRNewswire-FirstCall/ -- Mykrolis Corporation (NYSE:MYK), a leading supplier of components and subsystems to the semiconductor industry, today announced the release of its new Planarcore(TM) polyvinyl acetal (PVA) brushes. Due to their unique, patent-pending "integrally molded" design, Mykrolis Planarcore PVA brushes provide greater consistency and improved performance in post-CMP cleaning and polishing applications. Unlike traditional PVA products that are friction-fitted to a core, Mykrolis Planarcore PVA brushes feature PVA anchored to an integral brush core. This innovative design provides dimensional stability and core flow equalization and ensures that concentricity is not lost during use. As a result of these benefits and the high purity of PVA, particle counts on wafers are significantly reduced. "With our new Planarcore PVA brushes, Mykrolis offers the most advanced technology for wafer cleaning and polishing," said Christopher Wargo, director of the CMP business at Mykrolis. "Our proprietary design achieves absolute consistency from brush to brush, giving our customers greater control and reliability. The integral core design also facilitates rapid installation, another key consideration since tool uptime in a fab is critical to productivity and throughput. We already have several key customers using the Planarcore product, and the results so far have been very positive. We expect much wider usage with the official product launch." Mykrolis's new Planarcore PVA brushes will be on display at SEMICON West, booth #726, in San Francisco from July 12 to 14, 2004. About Mykrolis Mykrolis is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Based in Billerica, Massachusetts, Mykrolis is formerly Millipore Microelectronics, Inc. The Company acquired certain assets of Aeronex Corporation in October 2003. For more information, visit http://www.mykrolis.com/. Mykrolis is a registered trademark of Mykrolis Corporation. Planarcore is a trademark of Mykrolis Corp. CONTACT: Craig Lazinsky Mykrolis Corporation Tel. 978-436-6500 DATASOURCE: Mykrolis Corporation CONTACT: Craig Lazinsky of Mykrolis Corporation, +1-978-436-6500, Web site: http://www.mykrolis.com/

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