MYK Mykrolis Corp

Mykrolis Nominated for Process Critical Chamber Pressure Control Systems Advanced digital pressure controllers and vacuum gauging set a new standard for process pressure control -- a critical parameter in thin film processes BILLERICA, Mass., April 12 /PRNewswire-FirstCall/ -- Mykrolis Corporation today announced it has received multiple orders for the Intellisys(TM), an integrated vacuum control system that combines advanced "smart" valve and controller technology. Intellisys is the newest addition to the company's DSP-based instrumentation product line. The Mykrolis process-critical chamber pressure control sub-system, which comprises the Intellisys integrated butterfly throttle valve systems and XacTorr(R) Digital Capacitance Diaphragm Gauges (CDGs), was nominated by a large Asian semiconductor manufacturer for 300mm processing equipment. "This nomination reflects Mykrolis's focus and commitment to vacuum control applications and technology and our ability to supportour customers around the world," said Shaun Pewsey, business development manager for vacuum products at Mykrolis. "The system, which represents the results of our strategic business development efforts, integrates the Intellisys advanced valve & motorcontrol technology with our DSP-based instrumentation product line to set a new standard for process pressure control for thin film processes." About Mykrolis Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized inthe semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Mykrolis is formerly Millipore Microelectronics, Inc. For more information, visit http://www.mykrolis.com/. XacTorr, IntelliFlow and Mykrolis are registered trademarks of Mykrolis Corporation. Intellisys is a trademark of Nor-Cal. DATASOURCE: Mykrolis Corporation CONTACT: Craig B. Lazinsky of Mykrolis Corporation, +01 978-436-6743, Web site: http://www.mykrolis.com/

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