SUSS MicroTec Launches ACS200 Gen3: the New Generation 200 Mm Automated Coater / Developer Platform
July 09 2012 - 12:02PM
Business Wire
SUSS MicroTec, a leading supplier of equipment and process
solutions for the semiconductor industry and related markets,
launches the third generation of the ACS200 Coating and Developing
Platform. This newly developed tool offers an excellent mix of
innovation and production proven technology components of the
well-established ACS200Plus and Gamma platforms. The ACS200 Gen3
offers the capability to combine four wet process modules with up
to 19 plates for high volume production.
The configuration flexibility of modules and technologies meets
not only the requirements of the Advanced Packaging, MEMS and LED
markets, it also bridges the gap between research & development
and high volume manufacturing. Especially the newly designed coater
module offers state of the art open bowl spin coating as well as
the patented GYRSET(R) closed cover coating technology.
'The ACS200 Gen3 combines innovative design and production
proven functionality with the modularity of our ACS200Plus and the
compactness of our Gamma platform', says Frank P. Averdung,
President and CEO of SUSS MicroTec. 'With this new generation we
can offer our customers an outstanding coater / developer platform
designed for precision and high yield production while focusing on
low cost of ownership.'
About SUSS MicroTec SUSS MicroTec, listed on TecDAX of Deutsche
Boerse AG, is a leading supplier of equipment and process solutions
for microstructuring in the semiconductor industry and related
markets. In close cooperation with research institutes and industry
partners SUSS MicroTec contributes to the advancement of
next-generation technologies such as 3D Integration and Nano
Imprint Lithography as well as key processes for MEMS and LED
manufacturing. With a global infrastructure for applications and
service SUSS MicroTec supports more than 8,000 installed systems
worldwide. SUSS MicroTec is headquartered in Garching near Munich,
Germany. For more information, please visit
http://www.suss.com.
Language: English Company: SÜSS MicroTec AG Schleissheimer
Strasse 90 85748 Garching Germany Phone: +49 (0)89 32007-161 Fax:
+49 (0)89 32007-451 E-mail:
ir@suss.com
Internet:
www.suss.com
ISIN: DE000A1K0235 WKN: A1K023 Indices: TecDAX Listed: Regulierter
Markt in Frankfurt (Prime Standard); Freiverkehr in Berlin,
Düsseldorf, Hamburg, München, Stuttgart
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